发明名称 MANUFACTURE OF SOLAR CELL
摘要 PROBLEM TO BE SOLVED: To improve energy conversion efficiency by preventing the destruction in the p-n junction part of a semiconductor substrate. SOLUTION: Dry etching is executed, and fine irregularities 2 are formed on a polycrystalline silicon substrate. Then, wet etching is executed, and the corners of the irregularities are made smooth. Then, impurity diffusion is conducted on the polycrystalline silicon substrate 1, and p-n junction part is formed after etching. A conductive paste is burnt on the surface and the back of the polycrystalline silicon substrate 1, and surface electrodes 7 and a back electrode 6 are formed.
申请公布号 JP2000101111(A) 申请公布日期 2000.04.07
申请号 JP19980283310 申请日期 1998.09.17
申请人 SHARP CORP 发明人 YOKOZAWA YUJI;MACHIDA TOSHIHIRO
分类号 H01L31/04 主分类号 H01L31/04
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