THICKNESS CHANGE MEASURING METHOD AND DEVICE OF PHOTOSENSITIVE LAYER USING CAPACITANCE MEASUREMENT

摘要

PURPOSE: A thickness change measuring device of a photosensitive layer is provided to prevent coating defect of the photosensitive layer by measuring thickness change of the photosensitive layer in each position. CONSTITUTION: A thickness change measuring device of a photosensitive layer comprises a first electrode where a wafer coated by a photosensitive layer is mounted upon one side thereof, a second electrode which is opposite to the photosensitive layer and has a distance to the first electrode, a power supply coupled to the first and the second electrodes, and a current measurer located between the first and the second electrodes.