| 摘要 |
PROBLEM TO BE SOLVED: To reduce a time required for specifying a fault position of a defective semiconductor device. SOLUTION: In the case of specifying a fault position of a defective semiconductor device, nodes of a fault candidate existing on a flow of a series of signals are summarized as one path. This path is normally a plurality, but one of the paths is selected, a waveform of the node nearest an output stage is measured. If the waveform of the node is normal, the other node included in the path is judged to be normal. Accordingly, the nodes to be measured for the waveforms can be reduced, and hence a time and a labor for specifying the fault position can be alleviated.
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