| 摘要 |
PROBLEM TO BE SOLVED: To realize a small-sized and light-weight prober with a stage which will not be tilted, even if a needle is brought into contact with it. SOLUTION: A prober provided with a stage which carries on itself a wafer disposed with a plurality of semiconductor chips and a probe to be brought into contact with electrode pads of each semiconductor chip. The stage is constituted of a mounting table 11 for mounting a wafer on, guides 22, 23, 24 for regulating the vertical movements of the mounting table, and a plurality of actuators for energizing a plurality of spots for the mounting table 11, so as to move the mounting table 11 vertically.
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