IN-CUP LIQUID COLLECTION MECHANISM

摘要

PROBLEM TO BE SOLVED: To reduce liquid residue in a cup in a spin treatment device. SOLUTION: A drain hole 8 is shaped in a circular liquid bank 6 formed in a bottom of a cup 1. Meanwhile, the drain hole 8 is covered with a liquid collection member 10 wherein an opening part 9 is formed only in a direction for introducing flow of liquid generated in the liquid bank 6 as a rotating table rotates. Liquid introduced from the opening part 9 into the liquid collection member 10 is introduced to the drain hole 8 and is drained from the cup 1.