发明名称 Substrate on which bumps are formed and method of forming the same
摘要 A bi-layer bump comprises a base layer composed of sprayed aluminum thick film having a thickness of about 20 mu m formed to cover the periphery of the passivation film formed on each pad electrode, a surface layer composed of sprayed copper thick film having a thickness of about 30 mu m formed on the base layer. According to the above-mentioned structure, a substrate on which bumps are formed which has an excellent electric property and connecting reliability, wherein an interlayer insulating layer, an active layer and a multi-layer wiring can be provided under the pad electrode can be obtained.
申请公布号 US6042953(A) 申请公布日期 2000.03.28
申请号 US19970820779 申请日期 1997.03.18
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 YAMAGUCHI, KAZUFUMI;MITANI, TSUTOMU;ASABE, MITSUO
分类号 H01L21/60;H01L23/485;(IPC1-7):B32B15/10;B32B15/00;H01H1/02 主分类号 H01L21/60
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