发明名称 |
Substrate on which bumps are formed and method of forming the same |
摘要 |
A bi-layer bump comprises a base layer composed of sprayed aluminum thick film having a thickness of about 20 mu m formed to cover the periphery of the passivation film formed on each pad electrode, a surface layer composed of sprayed copper thick film having a thickness of about 30 mu m formed on the base layer. According to the above-mentioned structure, a substrate on which bumps are formed which has an excellent electric property and connecting reliability, wherein an interlayer insulating layer, an active layer and a multi-layer wiring can be provided under the pad electrode can be obtained. |
申请公布号 |
US6042953(A) |
申请公布日期 |
2000.03.28 |
申请号 |
US19970820779 |
申请日期 |
1997.03.18 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
YAMAGUCHI, KAZUFUMI;MITANI, TSUTOMU;ASABE, MITSUO |
分类号 |
H01L21/60;H01L23/485;(IPC1-7):B32B15/10;B32B15/00;H01H1/02 |
主分类号 |
H01L21/60 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|