| 摘要 |
PROBLEM TO BE SOLVED: To provide a modifying method of a film by which the modification can be efficiently performed and electric breakdown characteristics of the film can be improved by using not only UV rays but also IR rays as the modification light source. SOLUTION: When the objective film consisting of one of metal oxide film, metal film and metal nitride film formed on the surface of the objective body W is to subjected to modification, the film is irradiated with modification rays 54 including UV rays UV and IR rays IR in the presence of a modification gas. Thereby, not only UV rays but also IR rays can be used as modification rays and therefore, the modification treatment can be efficiently performed and the dielectric breakdown characteristics can be improved.
|
