| 摘要 |
<p>An electron beam device having a pressure member for withstanding the atmospheric pressure such as a spacer between an electron source and an object to be irradiated with an electron source and adapted for suppressing the charging of the pressure member, a charging-suppressing member, and a method for producing the same are disclosed. An electron beam device having an electron source for emitting electrons, an object to be irradiated with electrons, and a first member disposed between the electron source and the object is characterized in that the surface of the first member is rugged, and the projecting portions of the rugged surface is like a network. Alternatively the electron beam device is characterized in that the surface of the object is rugged, and the surface has a recessed portion continuously surrounding the projections.</p> |
