| 摘要 |
PROBLEM TO BE SOLVED: To eliminate an offset voltage without reducing the detection sensitivity. SOLUTION: First fixed electrodes 3 and 4 and second fixed electrodes 5 and 6 are arranged oppositely to each other at one and the other sides of a movable electrode 2, and a carrier signal is alternately applied to the first fixed electrodes 3 and 4 and the second fixed electrodes 5 and 6 by a signal generation circuit 7. Also, the difference in capacitance between the first fixed electrodes 3 and 4 and the movable electrode 2 and between the second fixed electrodes 5 and 6 and the movable electrode 2 is converted to a voltage corresponding to acceleration by a C-V conversion circuit 8 and is outputted. Also, an offset correction circuit 11 is provided for correcting offset and a capacitor for correcting offset being selected out of a plurality of capacitors 11a-11d with different capacities is connected between the fixed electrodes 3 and 4 and the movable electrode 2 by a connection means 11. |
