| 摘要 |
PROBLEM TO BE SOLVED: To prevent a vacuum space from being contaminated with dust generated from a mechanism while driving a valve plate for opening and closing a communication port in a valve casing in a vacuum gate valve between front and rear vacuum vessels by a mechanical mechanism. SOLUTION: A valve plate support 18 capable of being raised and lowered between the valve opening position and the valve closing position, front and rear valve plates 14, 15 separatively supported on the valve plate support 18, and a valve plate driving mechanism 39 for opening and closing the valve plates 14, 15 by raising and lowering a valve driving body 25 are provided in a valve casing 6, and a mechanism housing bellows 41 for housing the valve plate driving mechanism 39 is mounted between the valve plates 14, 15. Moreover, a cylindrical supporting rod 46 airtightly extending through the bottom wall of the valve casing 6 and for moving the valve plate support 18 between the valve opening position and the valve closing position, and a driving rod 49 inserted in the supporting rod 46 and for operating the valve plate driving mechanism 39 are provided, and a supporting rod housing bellows 67 for covering the support rod penetration part is mounted between the supporting rod 46 and the lower wall of the valve casing 6 on the periphery of the penetration part.
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