SUPPLY OF PURE WATER CONTAINING CARBON DIOXIDE GAS DISSOLVED THEREIN, UNIT FOR SUPPLYING PURE WATER CONTAINING CARBON DIOXIDE GAS DISSOLVED THEREIN, AND SUBSTRATE PROCESSING APPARATUS EQUIPPED WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a unit for supplying pure water having carbon dioxide gas dissolved therein, which supplies pure water deprived of a metal ion originating from measurement by a relative resistance meter and containing carbon dioxide gas dissolved therein. SOLUTION: Pure water supplied from a pure water supply source is made to pass through a permeation section 40 of a carbon dioxide gas dissolving section 4 and is hanged into pure water containing carbon dioxide gas dissolved therein. The pure water containing carbon dioxide gas dissolved therein is supplied to a substrate processing unit 2 via a supply pipe 3. A part of the pure water containing carbon dioxide gas dissolved therein supplied to the substrate processing unit 2 is taken out by a branching pipe 5. Relative resistance value of the taken out pure water is measured by an electrode 6 as a measuring section of a relative resistance meter 8. A control section 7 controls the relative resistance value of the pure water containing carbon dioxide gas dissolved therein in response to the measured relative resistance value. Therefore, the pure water containing carbon dioxide gas dissolved therein does not include a metal ion and a specified relative resistance value is controlled.