发明名称 |
Antifuse with improved on-state reliability |
摘要 |
Treatment of the positive electrode interface of an antifuse provides significantly improved on-state reliability. Treatments include, but are not limited to, a plasma etch using carbon tetrafluoride (CF4), a sputter clean using Argon, and wet chemical treatments using dimethyl formamide (and water) or a resist developer.
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申请公布号 |
US6033938(A) |
申请公布日期 |
2000.03.07 |
申请号 |
US19960751193 |
申请日期 |
1996.11.15 |
申请人 |
XILINX, INC. |
发明人 |
VOOGEL, MARTIN L.;KARPOVICH, YAKOV;HART, MICHAEL J. |
分类号 |
H01L23/525;(IPC1-7):H01L21/82 |
主分类号 |
H01L23/525 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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