发明名称 INKER FOR DIE SORTING & INK DOTTING METHOD USING THE INKER
摘要 PURPOSE: An inker and a dotting method are provided which perform an ink dotting process according to an optimal movement, regardless of the order of the previous manufacturing process, when each die of a wafer where elements are formed is checked electrically and inferior dies are indicated by being dotted with ink during the semiconductor device manufacturing process as a kind of a wafer manufacturing process. CONSTITUTION: An inker comprises a data input device, a data sorter and a dotter. The data sorter acts the part of resorting the data to obtain an optimal circulation by dealing with the data from the data input device. When the first, the second, and the third data of an edge data is inputted through those devices, the first step of a dotting method is used to establish the standard data among the data with an inferior state die in the first and the second data, to detect the closest data to the standard data and to store it. Next, the closest data to the previously detected data are detected and stored. After the whole data are detected, the closest data to the final data are detected among the third data. When all the data are detected by the repetition of the former steps, the data are then resorted according to the detected order, and are dotted.
申请公布号 KR20000013512(A) 申请公布日期 2000.03.06
申请号 KR19980032403 申请日期 1998.08.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK, PE SEUNG;KIM, YOUNG IL;HWANG, DO YOUN
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利