FINE ADJUSTMENT MECHANISM OF PROBE DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce a cost by simplifying the configuration of a probe device, and facilitate position adjustment of a contact pin. SOLUTION: A base clamp 33 of a first unit 32 is supported on an upper board 44 of a fine adjustment device 31A. An X-axis adjusting table 52 operated by an X-axis adjusting knob 53, and a Y-axis adjusting table 56 operated by a Y-axis adjusting knob 55 are installed on the upper board 44. An angle adjusting shaft 59 is installed rotatably and movably upward and downward on the Y-axis adjusting table 56 and the lower part 59b is fixed on a mounting base 36. The mounting base 36 is moved forward and backward by a Z-axis adjusting setscrew 62 installed on the base clamp 33.