| 摘要 |
PROBLEM TO BE SOLVED: To enable a cantilever or probe and sample to quickly and automatically approach from separated state to close distance by calculating the quantity of deviation between a sample surface or cantilever back and focal position of an optical system. SOLUTION: In the state of separating the probe from the sample, the sample is driven toward the cantilever by a three-dimensional(3D) stage, and the next measuring point is moved to just under the probe (S73). Two peaks of light intensity are detected, a distance (x) between them is found and that distance is compared with a prescribed value (y) (S74 and S76). At such a time, on the condition of x>y, the cantilever is made close to the sample by a 3D scanner (S75) and the comparison between (x) and (y) is performed again. When the distance (x) gets smaller than (y) by the approach of the cantilever to the sample, namely, on the condition of x<=y, the approach of the probe to the sample due to an auto focus mechanism is finished and while monitoring the deflection of the cantilever as performed by an ordinary scanning type probe microscope, the probe automatically approaches by the 3D scanner (S77). |
