| 摘要 |
PROBLEM TO BE SOLVED: To provide a total internal reflection(TIR) holography system device, its method and an optical instrument used in the TIR holography device. SOLUTION: The optical instrument is provided with a plate 23 consisting of a material capable of transmitting light used in a lithography process and having nearly planar first and second surfaces. This plate 23 is provided with a periodic grating structure 25 on the first surface, and this period is set so that only an 0-order light beam 33 and a 1st-order light beam 29 of the light 27 made incident on the first surface at a prescribed incident angleθ4, as to the incident angle and the wavelength of the light and the reflectance, transmit through the plate 23, and the transmitted 1st-order diffracted light beam 29 is totally reflected on a boundary surface between the second surface and air.
|
