发明名称 METHOD B FOR FORMING BLIND SPACE IN MULTI-LAYERED TARGET USING ULTRAVIOLET LASER PULSE THAT HAS VARIABLE ENERGY DENSITY
摘要 PURPOSE: A simple laser system used for generating laser pulse, is provided to remove saturation limit about the ratio of removing power density per pulse. CONSTITUTION: A laser system(10) has a resonating device(12) that is a laser rod(14) placed between a rear reflecting mirror(16) and an output reflecting mirror(18) along a light shaft(20). The laser rod has a solid-state material such as Nd:YAG, Nd:YLF, Nd:YAP or Nd:YVO4, or a YAG crystal doped by Holmium or Erbium. The output of the laser rod is changed to the ultraviolet wave length through the two steps of generating a high frequency and changing a frequency. The second high frequency is inserted along the light shaft and generated by a first frequency commutator(32) such as a non linear crystal that is adjusted the angle for gaining the most suitable phase to the output of the laser rod.
申请公布号 KR20000010674(A) 申请公布日期 2000.02.25
申请号 KR19987008668 申请日期 1998.10.28
申请人 ELECTRO SCIENTIFIC INDUSTRIES INCORPORATED 发明人 OWEN MARK D.;RASON BONIE A.;BAN PUMBROECK JOSHEF
分类号 B23K26/00;B23K26/38;B23K26/40;B23K101/36;B23K101/42;C23C14/04;C23C14/28;H01L23/12;H05K3/00;H05K3/02;H05K3/40;H05K3/42;H05K3/46 主分类号 B23K26/00
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