发明名称 |
METHOD B FOR FORMING BLIND SPACE IN MULTI-LAYERED TARGET USING ULTRAVIOLET LASER PULSE THAT HAS VARIABLE ENERGY DENSITY |
摘要 |
PURPOSE: A simple laser system used for generating laser pulse, is provided to remove saturation limit about the ratio of removing power density per pulse. CONSTITUTION: A laser system(10) has a resonating device(12) that is a laser rod(14) placed between a rear reflecting mirror(16) and an output reflecting mirror(18) along a light shaft(20). The laser rod has a solid-state material such as Nd:YAG, Nd:YLF, Nd:YAP or Nd:YVO4, or a YAG crystal doped by Holmium or Erbium. The output of the laser rod is changed to the ultraviolet wave length through the two steps of generating a high frequency and changing a frequency. The second high frequency is inserted along the light shaft and generated by a first frequency commutator(32) such as a non linear crystal that is adjusted the angle for gaining the most suitable phase to the output of the laser rod. |
申请公布号 |
KR20000010674(A) |
申请公布日期 |
2000.02.25 |
申请号 |
KR19987008668 |
申请日期 |
1998.10.28 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES INCORPORATED |
发明人 |
OWEN MARK D.;RASON BONIE A.;BAN PUMBROECK JOSHEF |
分类号 |
B23K26/00;B23K26/38;B23K26/40;B23K101/36;B23K101/42;C23C14/04;C23C14/28;H01L23/12;H05K3/00;H05K3/02;H05K3/40;H05K3/42;H05K3/46 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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