发明名称 |
SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREOF |
摘要 |
PURPOSE: A semiconductor device is provided to improve an electric contact rate of a conductive film and a semiconductor element and to prevent a conductive film composing element from spreading toward the substrate. CONSTITUTION: The semiconductor device is produced in; step 1, forming an element separating film(12) on the substrate(11) made of P type silicon and forming a gate insulation film(13) on overall the substrate(11); and step 2, piling up a polysilicon film on overall the gate insulation film(13) and forming a gate electrode(1) by patterning the piled up polysilicon film, forming a drain area(15) and a source area(16) by injecting an arsenic(As) or a phosphorus(P) to produce a MOSS transistor(17).
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申请公布号 |
KR20000011357(A) |
申请公布日期 |
2000.02.25 |
申请号 |
KR19990025573 |
申请日期 |
1999.06.30 |
申请人 |
MATSHUSITA DENKI KOKYO K.K. |
发明人 |
NAKAO KEISAKU;SASAI YOICH;CHYUDAI YIGI;NOMA YATSSI |
分类号 |
H01L27/108;H01L21/02;H01L21/8242;(IPC1-7):H01L27/108 |
主分类号 |
H01L27/108 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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