发明名称 SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREOF
摘要 PURPOSE: A semiconductor device is provided to improve an electric contact rate of a conductive film and a semiconductor element and to prevent a conductive film composing element from spreading toward the substrate. CONSTITUTION: The semiconductor device is produced in; step 1, forming an element separating film(12) on the substrate(11) made of P type silicon and forming a gate insulation film(13) on overall the substrate(11); and step 2, piling up a polysilicon film on overall the gate insulation film(13) and forming a gate electrode(1) by patterning the piled up polysilicon film, forming a drain area(15) and a source area(16) by injecting an arsenic(As) or a phosphorus(P) to produce a MOSS transistor(17).
申请公布号 KR20000011357(A) 申请公布日期 2000.02.25
申请号 KR19990025573 申请日期 1999.06.30
申请人 MATSHUSITA DENKI KOKYO K.K. 发明人 NAKAO KEISAKU;SASAI YOICH;CHYUDAI YIGI;NOMA YATSSI
分类号 H01L27/108;H01L21/02;H01L21/8242;(IPC1-7):H01L27/108 主分类号 H01L27/108
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