发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a method for simply manufacturing a semiconductor device such as a chip size package comprising a sealing material layer formed to cover a surface of an element forming bumps and to expose an edge of the bump. SOLUTION: A wafer having an reactive sealing material on it is put on a supporting body for molding, the reactive sealing material is covered by a film for stripping, and the sealing material is spread over the surface of the wafer by heating and pressurizing through the wafer and the film for stripping. The sealing material is molded for the time required more than 30% to less than 100% of a reactive rate of the sealing material under this molding temperature, the sealing material is cooled, the sheet for stripping is stripped off, the wafer is sealed by the sealing material so that an end face of a bump is exposed, and the wafer is cut into individual elements. The sealing material desirably comprises a composition of an epoxy resin, hardener solvent, filler, and hardener catalyst.
申请公布号 JP2000058587(A) 申请公布日期 2000.02.25
申请号 JP19980228189 申请日期 1998.08.12
申请人 FUJITSU LTD 发明人 TAKIGAWA YUKIO;YANO EI;FUKAZAWA NORIO;MORIOKA MUNETOMO
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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