| 摘要 |
PROBLEM TO BE SOLVED: To eliminate inconveniences of deterioration of heat insulating material caused by evaporation of metal of low melting point and a reduction in quality of substances to be processed. SOLUTION: An inner box 3 for storing a substance W to be processed is internally installed within a heating space. An inner side of the inner box 3 is evacuated by an evacuating system 5 through a cooling surface 4 arranged at an inner space S2 of a furnace outside a heat insulating material 2, resulting in that either brazing material X evaporated within the inner box 3 or low melting point metal such as a getter material G and the like is condensed at the cooling surface 4 and then adhesion of it to the heat insulating material 2 and its re-evaporation can be effectively avoided.
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