| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for supplying purified gas to a plant which reduces the running cost of the plant and can give a certain degree of independence from a source to the plant. SOLUTION: This apparatus is equipped with a supply line 5 which supplies purified gas is to a plant 3 purged by using the purified gas, with one connected with the source 7 of the purified gas and the other connected with the introduction port of the plant 3, a line 9 for recovering polluted gas at the discharge opening of the plant 3 which is connected with the supply line 5, compressors 11 arranged in sequence downstream from a point where the recovery line 9 is connected with the supply line 5, and a means 13 for separating impurities from the polluted gas by permeation in order to supply the purified gas to the plant 3, and the purified gas is contaminated with impurities when the gas passes through the plant 3.
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