| 摘要 |
PROBLEM TO BE SOLVED: To provide a circulated solution recoverer that causes the chemical solution remaining in the machine not to slop out and not stain the surrounding on the post-clearance work. SOLUTION: This recoverer is equipped with a pump 10, the first three-way valve 20, the second three-way valve 30, the first auxiliary pipe 52 and the second auxiliary pipe 61 where the first three-way valve 20 and the second three-way valve 30 individually have the first link openings 21, 31, the second link openings 22, 32 and the third openings 23, 33. Simultaneously, these three- way valves are operated to link the first link openings to the second link openings or to link the first link openings to the third link openings, to link the third link opening for the first three-way valve to the third link opening for the second three-way valve and to link the liquid-sucking pipe to the midway of the first auxiliary tube and to link the solution-feeding pipe to the second auxiliary pipe.
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