| 摘要 |
PROBLEM TO BE SOLVED: To carry a substrate without damaging the surface of the substrate by providing a function supporting both the ends of the substrate and a function jetting and supporting a fluid such as a gas and a liquid in the vicinity of the center of the substrate, in a carrier device of the substrate for manufacturing to be utilized in a manufacturing process for a color filter for a liquid crystal display device. SOLUTION: A substrate carrier 1 carriers a substrate 7 of a color filter by supporting the left and right sides of a carrier direction of rollers 2. Many rollers 2 provided along the carrier direction of the substrate 7b are formed integrally with both the end parts of a shaft 3 supported by the body of the device 1 in a bearing 4. By installing a piping 5 in which a hole is opened in the vicinity of the center part of the left and right rollers 2, introducing water into this piping 5 and jetting water 6 from many holes formed in this piping 5, the vicinity of the center part of the substrate 7 is floated and supported. By rotating the rollers 2 in a state that the substrate 7 is floated, the substrate 7 is carried. As a result, the substrate 7 can be stably carried without damaging the surface of the substrate 7.
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