| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive film actuator, wherein a high bending displacement is obtd. at a low voltage, the reliability is high, the response speed is high and a high level of integration can be made. SOLUTION: A thin-walled insulative ceramic substrate 2 is formed from a partly stabilized zirconia ceramics contg. dysprosium oxide and cerium oxide as a stabilizer, the crystal phase of zirconia thereof is mainly tetragonal in shape. One main surface of the substrate 2 has a mean center line roughness Ra of 0.03-0.9μm, and a lower electrode film 4, piezoelectric/electrostrictive layer film 5 and upper electrode film 8 are sintered together on this substrate surface to form a unifield drive, thus constituting a piezoelectric/electrostrictive actuator.
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