| 摘要 |
PROBLEM TO BE SOLVED: To improve the detection precision of an angular velocity by making the continuous vibration of a vibrator stable. SOLUTION: This sensor is equipped with a couple of (x) vibrators 2 and 3 at positions symmetrical about a point O, coupling beams 11 and 14 which connect with the (x) vibrators 2 and 3 and bend at least in an (x) direction, a support beam 4 which connects with the coupling beams 11 and 14 and is symmetrical about the point O between the point O and coupling beams, detecting vibrators 5 and 6 which are distant from the point O in the (x) direction and symmetrical about the point O, and reinforcing beams 7 and 8 which connect with the detection vibrators 5 and are provided in the (x) vibrators and symmetrical about the point O, and an anchor which supports the support beam 4 at the point O. |
