发明名称 DISTORTION CORRECTION DEVICE OF SCANNING ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To prevent distortion even when a deflecting coil is used in a scanning coil by installing a variable means which varies scanning time per pixel according to a distortion correcting amount, measuring a specified pattern dimension on a screen, and converting the measuring error of the pattern into a time correcting amount per pixel. SOLUTION: A one step time adjusting part 31 receives an output from a scanning signal forming part 32, and conducts step time correction per pixel. The output of the adjusting part 31 is inputted in a scanning signal driving circuit 10, a detecting signal from a detector 5 is sent to a length value measuring part 20 through an amplifier 6, an A/D converter 7, and an image processing device 8 to measure previously decided block length, and based on the measured signal, a correcting amount calculating part 21 finds a time correcting amount per step. In a scanning signal generator 30, the adjusting part 31 adds a time correcting value from the correcting amount calculating part 21 to a constant periodic step sent from the scanning signal forming part 32, and the scanning signal driving circuit 10 is driven. Thereby, an image signal with no distortion can be obtained.
申请公布号 JP2000048755(A) 申请公布日期 2000.02.18
申请号 JP19980215405 申请日期 1998.07.30
申请人 JEOL LTD 发明人 YAMADA ATSUSHI
分类号 H01J37/147;H01J37/153;(IPC1-7):H01J37/153 主分类号 H01J37/147
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