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经营范围
发明名称
Plasma process and apparatus
摘要
申请公布号
GB9930604(D0)
申请公布日期
2000.02.16
申请号
GB19990030604
申请日期
1999.12.24
申请人
SURFACE TECHNOLOGY SYSTEMS LIMITED
发明人
分类号
主分类号
代理机构
代理人
主权项
地址
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