| 摘要 |
<p>PROBLEM TO BE SOLVED: To protect a working environment of high cleanliness against contamination caused by particles generated due to contact between the mechanical components of a mechanism which vertically moves a light emitting part and a light receiving part. SOLUTION: A detecting device is equipped with a case 11, where a light emitting part 9 and a light emitting part drive mechanism 10 which vertically moves the light emitting part 9 are housed, and a case 14 where a photodetecting part 12 and a photodetecting part drive mechanism 13 which moves the photodetecting part 12 up or down, making it synchronized with the light emitting part 9 are housed, where the portions of the cases 11 and 14 through which the light emitting part 9 and the photodetecting part 12 are made to face each other are formed of light transmitting bodies 11a and 14a, and light emitted from the light emitting part 9 is received by the photodetecting part 12 to penetrate through the light transmitting bodies 11a and 14a of the cases 11 and 14.</p> |
