| 摘要 |
PROBLEM TO BE SOLVED: To form a high density plasma of a light element such as hydrogen and helium even in a narrow plasma chamber by using an antenna cover being composed of either one of alumina, MgO and titania and covering the periphery of an antenna, as a thermoelectron emitting source. SOLUTION: The outside of an antenna 2 is covered with an antenna cover 22, and this antenna cover 22 and an inner wall cover 3 are made of either one of alumina, MgO, titania, steanite, forstenite and macol. Raw material gas is introduced from a raw material gas inlet 21, and when a microwave is introduced into a vacuum vessel 1 from the antenna 2, a resonance magnetic field is generated in the vicinity of the antenna by a permanent magnet 4, so that an electron vibrates by the microwave. Then, when microwave power is increased, electron motion becomes active to collide with the antenna cover 22 and the inner wall cover 3, but since these are ceramic, heat is generated, the heat exceeds 1000 deg.C, and when the heat exceeds 1500 deg.C, a thermoelectron is emitted to become a new supply source of electrons. |
