| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump and a vacuum device, which gather no dust, and can adjust the output of sucking and discharging of gas. SOLUTION: These devices are equipped with a chamber 90 and a vacuum pump 1 capable of sucking and discharging gas held in the aforesaid chamber, and the vacuum pump 1 is equipped with a communication pipe 85 which goes through an outer sheath body, and communicates the outside with the rotor vanes and stator vanes of a turbo-molcular pump part, inactive gas is fed to the turbo-molcular pump part out of the communication pipe 85 so as to be mixed with gas sucked in from the inside of the chamber 90. The communication pipe 85 is equipped with a valve 86, and the open/close of the valve 86 is controlled depending on the output of a pressure sensor 97 for the pressure of the chamber 90. The quantity of inactive gas to be fed to the turbo-molcular pump part is adjusted so as to allow the pressure of the vacuum pump to be adjusted, and the suction force of the chamber 90 is thereby adjusted.
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