发明名称 BURNER
摘要 PROBLEM TO BE SOLVED: To provide a burner which is free of problem to occurrence of particles, in both of the case where hydrogen gas/oxygen gas is at a usual mixture ratio and the case of steam oxidation processing utilizing low-flow hydrogen gas or steam oxidation processing utilizing the mixture ratio between low hydrogen gas/oxygen gas. SOLUTION: A burner is of such a constitution that it is equipped with a hydrogen gas jet to introduce hydrogen gas into a combustion container 2 and an oxygen gas jet to introduce oxygen gas into a combustion container 2, and that the opening area 12 of the hydrogen gas jet is not less than 0.12 cm2 and not more than 0.50 cm2 and besides the oxygen gas jet is located in the position 1-14 mm apart to the periphery from the center of the hydrogen gas jet, with its opening area 13 being 0.2-0.6 cm2, especially preferably, 0.3-0.5 cm2.
申请公布号 JP2000040699(A) 申请公布日期 2000.02.08
申请号 JP19980209717 申请日期 1998.07.24
申请人 MITSUBISHI ELECTRIC CORP;RYODEN SEMICONDUCTOR SYST ENG CORP 发明人 KUSAKABE YOSHIHIKO;INOUE KAZUYA;FUKUMOTO TAKATOMO;TAKAHARA SHOJI;TANIO MASAYA
分类号 F22B3/02;H01L21/31;(IPC1-7):H01L21/31 主分类号 F22B3/02
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