发明名称 CHARACTERISTIC MEASURING APPARATUS FOR MOBILE VIBRATION ACTUATOR
摘要 PROBLEM TO BE SOLVED: To continuously measure characteristics of a mobile vibration actuator. SOLUTION: The characteristic measuring apparatus comprises a traveling track 21 on which the mobile vibration actuator 10 travels, a converting means 24 for converting a motion of the actuator 10 into a rotary motion, measuring means 25, 27, and 30 for measuring values of the rotary motion, and calculating means 40 for calculating characteristics of the actuator 10 based on the values measured by the means 25, 27 and 30.
申请公布号 JP2000035377(A) 申请公布日期 2000.02.02
申请号 JP19980202451 申请日期 1998.07.17
申请人 NIKON CORP 发明人 UEDA TERU;MITOMI OSAMU
分类号 G01L5/00;G01M13/00;H02N2/00 主分类号 G01L5/00
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