| 摘要 |
PROBLEM TO BE SOLVED: To conduct accurate inspection without being affected by various kinds of fluctuation. SOLUTION: In the case where inspection of an object 2 is conducted by comparing the output signal of an accumulation type line sensor 1 when the inspection object 2 and the accumulation type line sensor 1 are relatively moved, and the reference data for inspecting the object 2, a correction coefficient holder 17 holding in advance the coefficient corresponding to the amplitude of the reference data for the line width of the inspection object 2 is provided, the correction coefficient for the line width of the object 2 is read out of the correction coefficient holder 17 with the reference data correction part 18, the amplitude of the reference data is corrected with this correction coefficient, and the corrected reference data and the output signal of the accumulation type line sensor 1 are compared to inspect the object 2.
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