METHOD FOR MANUFACTURING PHASE SHIFTING MASK,申请号KR19920000296-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING PHASE SHIFTING MASK
摘要
申请公布号	KR100244243(B1)	申请公布日期	2000.02.01
申请号	KR19920000296	申请日期	1992.01.11
申请人	HYUNDAI MICRO ELECTRONICS CO.,LTD.	发明人	JONG, JAE YONG
分类号	H01L21/31;(IPC1-7):H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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