| 摘要 |
PROBLEM TO BE SOLVED: To detect the breaking of a reaction-gas supply pipe arranged in a reaction furnace so as to assist finding the cause and to perform the immediate replacement and the like of the reaction-gas supply pipe. SOLUTION: This device for detecting breakages is constituted of the following devices in a pressure reducing semiconductor manufacturing apparatus, an acceleration sensor S, which is attached to a cap 8 for detecting vibration caused by the breaking of a reaction gas pipe and falling on the manifold cap 8, a sensor controller C, which continuously operates the output value from the acceleration sensor S and outputs the detection signal when the reaction gas pipe is broken, and a display device D, which continuously displays the output state of the acceleration sensor S.
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