| 摘要 |
PROBLEM TO BE SOLVED: To quickly and precisely realize the defect inspection of an object having a complicate shape such as a bonding pad. SOLUTION: Points on the outline of an object to be inspected in an image are traced by an outline tracing part 16 so that the coordinate list of the points on the outline can be generated, and a featured value arithmetically derived by using total three points in the coordinate list, that is, one arbitrary point in the coordinate list and two points separated from the arbitrary point only by (s) forward and backward in the coordinate list, for example, the area of a triangle formed by connecting the three points is calculated related with all the points in the coordinate list. Then, the transition of the featured value is calculated by a transition pattern converting part 24, and whether or not the transition pattern is matched with a reference transition pattern preliminarily stored in a reference transition pattern storage part 26 is judged by a transition pattern matching part 28, and the presence or absence of any defect is judged according to the result by a judging part 30.
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