| 摘要 |
PURPOSE: A thin film actuated mirrors array in an optical projection system is provided to increase a electrical property of a deformable layer by avoiding a diffusion which Pb of PZT are diffused to a lower and a upper electrodes. CONSTITUTION: The thin film actuated mirrors array comprising an active matrix (100) including a first metal layer (135), which a MOS transistor is built-in and a drain pad extending from a drain of the transistor; a supporter (175) formed on the active matrix and included a support line (174), a supporting layer (170), a first anchor (171) and a second anchor (172a, 172b); an actuator (210) including a upper electrode (180), a first deformable layer (190), a first upper electrode (200), and a second deformable layer(191); a complimentary of the stress (340) formed on the first and the second deformable layers(190, 191); and a mirror(260) formed onto the actuator.
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