| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the surface of a frame from being damaged besides being high in cleaning capacity without manual help by washing the frame with pure water after dipping it in a solution containing a cationic surfactant. SOLUTION: This pellicle frame is washed with pure water after being dipped in a surfactant solution containing a cationic surfactant. The material and shape of the pellicle frame are not particularly limited, but effect is large particularly on a pellicle frame made of an aluminum alloy. A cleaning agent containing the cationic surfactant can be suitably selected from a known material and used. Cleaning effect is heightened in the case of using an alkaline one, but it is preferable to select its property according to the material of the pellicle frame, a cleaning jig and a cleaning tank coming in contact with the solution. As to the general aluminum pellicle frame, it is necessary to select a neutral one from the viewpoint of protecting an alumite layer.</p> |
