| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional surface roughness form measuring machine, provided with an apparatus for vertically moving a detector which is excellent in following property of the Z-direction sending of a detector and scarcely changes the Z-direction position of the detector, when a room temperature is changed. SOLUTION: A Z slider 15 retaining a detector 17 of surface roughness is so constituted that backlashes are not generated in XY-directions, smooth movement in the Z-direction is enabled, and a moving force is generated in the Z downward direction. In a bulked part 11a of a base 11, a feed nut 23 is formed rotatably in the XY plane, and a feed screw 24 is screwed in the feed nut 23 and moved in the Z-direction by rotating the feed nut 23. The undersurface of the Z slider 15 is retained by the feed screw 24, and the Z slider 15 is driven by the feed screw 24.
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