| 摘要 |
An object of the present invention is to provide a novel testing probe allowing the testing of electronic circuits of a smaller dimension as compar ed to the prior art testing technique. A particular advantage of the present invention is related to the fact that the novel testing technique involving a novel multi-point probe (12, 14, 16, 18) allows the probe to be utilised for establishing a reliable contact between any testing pin or testing tip and a specific location of a test sample, as the testing probe according to the present invention includes individually bendable or flexible testing pins (1 4, 18). A particular feature of the present invention relates to the fact that the testing probe according to the present invention may be produced in a process compatible with the production of electronic circuits, allowing measurement electronics to be integrated on the testing probe, and allowing for tests to be performed on any device fabricated by any appropriate circui t technology involving planar technique, CMOS technique, thick-film technique or thin-film technique and also LSI and VLSI production techniques. |
