PHOTONIC DEVICE HAVING AN INTEGRAL GUIDE AND METHOD OF MANUFACTURING

摘要

A process is provided for creating microstructure coupling guides for aligni ng photonic devices with optical signal carrying apparatuses. The process includes applying a photoresist to a semiconductor material, spinning the semiconductor material, baking the semiconductor material, exposing the photoresist, baking the semiconductor material a second time, and developing the resist. The process creates a microstructure that acts as an integral guide to align and maintain the relative position between an optical signal carrying apparatus and a photonic device.