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发明名称
摘要
申请公布号
JP2999172(B2)
申请公布日期
2000.01.17
申请号
JP19980092062
申请日期
1998.04.03
申请人
发明人
分类号
H01L21/28;H01L21/60;H01L21/768;H01L21/822;H01L23/522;H01L27/04;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/28
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代理人
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地址
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