DEVICE FOR SUPPLYING CHEMICALS FOR MANUFACTURING SEMICONDUCTOR APPARATUS

摘要

PURPOSE: A device for supplying chemicals for manufacturing a semiconductor apparatus is provided to increase a moving rate of a chemical supplying apparatus and to enable the apparatus to operate stably for increasing productivity. CONSTITUTION: A device for supplying chemicals for manufacturing a semiconductor apparatus comprises: a carrier gas supply source(1) for transferring the chemicals by pressurization; a chemical tank(3) connected to the carrier gas supplying source; a process chamber(5) connected to the chemicals tank; and an orifice gasket(11) installed on a carrier gas supplying line(2).