| 摘要 |
PURPOSE: A method for identifying the electrode horizon in a process chamber is provided to adjust the pitch and the horizon between an anode and a cathode of an electrode. CONSTITUTION: The method for identifying the electrode horizon in a process chamber which comprises a gap housing(4), which is variably attached to a chamber housing(1) and has one end projected outside the top of the chamber housing and the other end extended into the chamber housing, an anode(2), which is attached to a lower side in a chamber housing, a cathode(3), which is fixed to the lower side of the chamber housing, and plural horizons identify tools(5) disposed at a right/left side of the top of the chamber housing, comprises the steps of: moving up and down the gap housing; and adjusting a place of the gab housing so as to be close to the top side of the horizons identify tools.
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