发明名称 |
METHOD FOR MANUFACTURING PZT THICK FILM USING LOCAL MELTING MATERIALS |
摘要 |
PURPOSE: A fabricating method of PZT thick film is provided to improve a piezoelectric and a dielectric properties by using local melting materials. CONSTITUTION: The method comprises the steps of: mixing and grinding a first material having low melting point such as PbO, CH3COOPb-3H2O and Pb(NO3)2 and a second material having high melting point such as ZrO2, TiO2, PbTiO3 and PbZrO3; mixing a polymer material such as polyethylene glycol, alpha-tepineol, polyvinyl butyral and butoxy epoxy ethyl acetate; making an ink for enhancing a screen printing; printing on a desired substrate using the ink; drying to remove the polymer material contained the sample; and annealing to form PZT. |
申请公布号 |
KR20000001736(A) |
申请公布日期 |
2000.01.15 |
申请号 |
KR19980022134 |
申请日期 |
1998.06.13 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
NO, KWANG SOO;JEON, YONG BAE;LEE, CHANG HO;JEONG, JAE SIK;SONG, HAN WOOK |
分类号 |
H01L41/41;H01L41/43;(IPC1-7):H01L21/31 |
主分类号 |
H01L41/41 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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