发明名称 METHOD FOR MANUFACTURING PZT THICK FILM USING LOCAL MELTING MATERIALS
摘要 PURPOSE: A fabricating method of PZT thick film is provided to improve a piezoelectric and a dielectric properties by using local melting materials. CONSTITUTION: The method comprises the steps of: mixing and grinding a first material having low melting point such as PbO, CH3COOPb-3H2O and Pb(NO3)2 and a second material having high melting point such as ZrO2, TiO2, PbTiO3 and PbZrO3; mixing a polymer material such as polyethylene glycol, alpha-tepineol, polyvinyl butyral and butoxy epoxy ethyl acetate; making an ink for enhancing a screen printing; printing on a desired substrate using the ink; drying to remove the polymer material contained the sample; and annealing to form PZT.
申请公布号 KR20000001736(A) 申请公布日期 2000.01.15
申请号 KR19980022134 申请日期 1998.06.13
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 NO, KWANG SOO;JEON, YONG BAE;LEE, CHANG HO;JEONG, JAE SIK;SONG, HAN WOOK
分类号 H01L41/41;H01L41/43;(IPC1-7):H01L21/31 主分类号 H01L41/41
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