| 发明名称 |
Plasma-Entschichtungsvorrichtung mit Mikrowellenfalle |
| 摘要 |
A plasma asher which obviates microwave leakage and attendant problems by providing a microwave trap (20) proximate the opening through which the plasma tube (8) exits the microwave cavity. <IMAGE> |
| 申请公布号 |
DE69510576(T2) |
申请公布日期 |
2000.01.13 |
| 申请号 |
DE1995610576T |
申请日期 |
1995.02.20 |
| 申请人 |
FUSION SYSTEMS CORP., ROCKVILLE |
发明人 |
KAMAREHI, MOHAMMAD;SIMPSON, JAMES E. |
| 分类号 |
H05H1/46;G03F7/34;H01J37/32;H01L21/302;H01L21/304;H01L21/3065;H01P7/06;H05B6/76;(IPC1-7):H01J37/32 |
主分类号 |
H05H1/46 |
| 代理机构 |
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代理人 |
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| 地址 |
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