| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device which can maintain processing liquid in a good condition, and can maintain a processing phenomenon by the EEM highly stably. SOLUTION: This processing device is provided with a closed tank 3 for storing a processing liquid 2; a processing stage 6 soaked in the processing liquid 2 in the closed tank 3, held by a static bearing for holding a work piece 5; and a driving stage 28 provided outside the closed tank 3, for moving the processing stage 6. The driving stage 28 moves the processing stage 6 by the magnetic combination, through nonmagnetic film 7 of the wall of the closed tank 3. |
