| 摘要 |
PROBLEM TO BE SOLVED: To narrow an unstable region when a coating fluid beings to be supplied or the supply is stopped so that the effective area for coating of a base can be secured broadly by adjusting plural parameters in accordance with observation results regardless of the viscosity of the coating fluid and adjusting the parameters to a rising and a falling waveform of an almost trapezoidal shape. SOLUTION: A coating head 1 is of such a construction that a coating fluid T contained in a tank 24 is supplied through a flow path 25 in response to the supply pressure of a gas to be supplied from an atmospherics unit 23. A degasing device 26 whose interior is set in a vacuum state by connecting the device 26 to a vacuum pump 29 through a solenoid valve 28, is connected to the flow path 25 and thus it is possible to remove the gas included into the coating fluid T. In addition, a distance sensor 6 for measuring a space between the coating head 1 and a base W is installed on the coating head 1 so that the space is maintained as specified. Further a pressure sensor 5 is provided on the coating head 1 fitting part of a supply pipe 2 to observe the pressure behavior of the fluid T to an area near an opening part 1a. Besides the pressure sensor 5 controls a fluid control valve based on observation information and diminishes an unstable region at the time of starting the supply the fluid T or the like.
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