| 摘要 |
<p>PROBLEM TO BE SOLVED: To realize an electrostatic chuck which is high in dielectric breakdown strength, shallow, and excellent in covering properties. SOLUTION: An electrostatic chuck 500 is provided on the substrate mounting surface of an electrode 12 where heat transfer gas feed holes 43 are formed and equipped with a conductive layer 55 and insulating layers that sandwich the layer 55 between them, where one of the insulating layers located nearer to a substrate than the other comprises thin film layers 571 and 573. Even if either of the thin film layers is partially damaged, a dielectric breakdown hardly occurs in the electrostatic chuck 500. Grooves communicating with the heat transferring gas feed holes 43 are reticulately provided to the substrate mounting surface of the electrode 12, the conductive layer 55 and the insulating layers 53 and 571 to 573 are brought into close contact with the substrate mounting surface of the electrode 12 including the bases of the grooves, and the heat transferring gas feed holes 43 are provided penetrating through these layers. The insulating layers 53 and 571 to 573 are present even on the bases of the grooves 510.</p> |
