| 摘要 |
PROBLEM TO BE SOLVED: To prevent a rest from being oscillated in a motor driving unit and an X-Y table in a semiconductor manufacturing device. SOLUTION: A linear motor driving unit, wherein a driving body 10 is driven by a linear motor 4, is constituted into such a structure that a motor main body 6 of the motor 4 and the driving body 10 are provided on a rest 2 movably in the same drive shaft direction, a linear moving part 8 of the motor 4 and the driving body 10 are coupled with each other and when this driving body 10 is driven, the main body 6 is provided so as to be able to move in the opposite direction to the driving body 10 and a counterforce due to a drive of the driving body 10 is negated.
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